Vacuum Pump

(Oil required) Rotary Vacuum Pump

Rotary Pumping Speed

50 Hz: 8 m³/h (2.2 L/s) / 60 Hz : 9.6m³/h (2.6 L/s)

Vacuum Limit

2 Pa

Max Sputtering Current

50 mA

Working Pressure

20 Pa-8 Pa

Vacuuming Time

<5 Min ( 2 Pa )

Vacuum Measure

Measuring range from atmosphere to 2x10^-2mbar

Gas Control

Gas Flow Controller

Chamber Size

φ150 * 120mm (height) Scratch Resistant Quartz Glass

Target Source

Target size  φ47mm (Au x 0.1mm, Ag*0.5mm, Cu*0.5mm) /Target source: Au, Ag, Pt, Cu

Operation Method

Instruction Manual

Weight / Size

52kg / 390mm length x 340mm wide x 370mm high

Power Supply

AC 110V 60Hz orAC 220V 50Hz

Power Consumption

< 1500W

Rotary Sample Platform

A B C Positions

Warranty

One year limited warranty with lifetime product support