Split Type Single Target Magnetron Coating Coater Machine 

with Quartz Vacuum Cavity

Introduction

This equipment is a single-target magnetron coater, which can be used for the preparation of metal thin films, and has applications in the field of electronics, optics, special ceramic preparation, etc. It can also be used for laboratory SEM sample preparation.

This set of configuration uses quartz vacuum cavity, the coating process omnidirectional visualization, easy to observe and record the experiment, the cavity design is convenient to open, easy to clean, very suitable for laboratory use. At the same time, the equipment is equipped with a rotary heating sample table, which can effectively improve the uniformity of the film and the quality of film formation. The whole machine adopts modular design, with simple operation logic and intuitive operation interface, which is easy to get started.

The vacuum acquisition system of the equipment adopts two-stage vacuum pump set, the front pump is a large pumping speed mechanical pump, which can effectively reduce the time from atmospheric pressure to low vacuum, and the main pump is a turbo molecular pump, with high pumping speed and faster vacuum acquisition. The overall vacuum acquisition system is clean and fast.

Technical parameters