Tel : +86 177 5900 4070
Email : gilia@inthelaboratory.com
Lab DC Vacuum Ion Sputtering Coating Coater Machine with
Vacuum Pump
Introduction
Ion Sputtering Coater (SD900 Model) is ideal and designed for lab SEM sample preparation. It is widely used to coat non-conductive SEM samples with Au for better imaging. It is also excellent for surface treatment.
Working vacuum pressure can be achieved quickly within 2 minutes when using proper vacuum pump. It generates much less heat. It is user friendly and easy to operate.
Vacuum pump is included.
Parameter
|
Vacuum pump set |
(Oil required) rotary vacuum pump |
|
Rotary pumping speed |
50 Hz : 8 m³/h (2.2 L/s)/ 60 Hz : 9.6m³/h (2.6 L/s) |
|
Vacuum limit |
2Pa |
|
Max sputtering current |
0-20mA |
|
Working pressure |
30Pa -7 Pa |
|
Vacuuming time |
<5 Min(2 Pa) |
|
Vacuum measure |
Measuring range from atmosphere to 2*10-2mbar |
|
Gas control |
Gas flow controller |
|
Chamber size |
Φ150*120mm (height) scratch resistant quartz glass |
|
Magnetron target source |
Target size φ 50*0.1mm(Au)/ target source: Au,Ag,Pt |
|
Operation method |
Instruction Manual |
|
Weight/size |
45kg/360mm length x 300mm wide x 380mm high |
|
Power supply |
AC 110V 60Hz or AC 220V 50Hz |
|
Power consumption |
<1500W |
|
Cooling method |
Air cooling |
|
Warranty |
One year limited warranty with lifetime product support
|
IPv6 network supported 