Vacuum Pump

(Oil required) Rotary Vacuum Pump

Rotary Pumping Speed

50Hz:16m³/h(4.4L/s)/60Hz:19.2m³/h(5.2L/s)

Vacuum Limit

2Pa

Max Sputtering Current

1.6A

Working Pressure

20Pa-8Pa

Vacuuming Time

＜5Min(2Pa)

Vacuum Measure

Measuring range from atmosphere to 2x10^-2mbar

Gas Control

Gas Flow Controller

Chamber Size

φ350*240mm(height) Scratch Resistant Quartz Glass

Target Source

Target size φ200mm/ Target source: Au,Ag,Pt,Cu

Operation Method

Instruction Manual

Weight/ Size

70kg/490mm length×400mm wide×590mm high

Power Supply

AC110V 60Hz or AC220V 50Hz

Power Consumption

<1500W

Warranty

One year limied warranty with lifetime product support