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Small Single Target Plasma Sputter Coater Sputtering Coating Machine

Contact Person:Gilia Ding


Email: gilia@inthelaboratory.com

Tel:+86 177 5900 4070
Telephone:+86-177-59004070
Whatsapp: +86 177 5900 4070
Wechat:Dingqiuna



  • Item no.:

    LITH-PSC
  • Payment:

    L/C, T/T, Western Union, Credit Cards, Paypal
  • Lead Time:

    7 days
  • Compliance:

    CE Certified
  • Warranty:

    Two years limited standard warranty
  • Product Detail

Small Single Target Plasma Sputter Coater Sputtering Coating Machine

  

 



Introduction

Single target plasma sputter coater is a cost effective plasma sputter coater developed by our company, which has the advantages of compact structure, easy to use, high integration and strong design sense. The plasma sputtering target is a standard size of 2 inches, and customers can choose different configurations of 1~3 targets according to their needs to meet different experimental requirements for plating single-layer films or multi-layer films of various materials. The instrument is equipped with a 150W DC high voltage power supply, which can be used for metal sputtering coating, especially for gold, silver, copper and other precious metals. The coating instrument is equipped with a venting interface for protective gas, if the customer needs to pass into the gas mixture, you can contact the staff to configure their own high-precision mass flow meter to meet the experimental needs.

 

Application

Can be used for metal sputtering coating, especially suitable for gold, silver, copper and other metals coating.


Main technical parameters

Sample table

Size

Φ138mm

Heating temperature

Maximum 500℃

Temperature control accuracy

±1℃

Rotation speed

1-20rpm adjustable

Plasma sputtering head

1 x 2" plasma target

Vacuum chamber

Cavity size

Φ180mm×150mm

Cavity material

High purity quartz

Viewing window

Omnidirectional transparent

Opening method

Top cover removal type

Front pole pump

VRD-4

Pumping rate

Rotary vane pump1.1L/S  

Ultimate vacuum

1.0E-1Pa

Pumping interface

KF16

Exhaust connection

KF16

Vacuum measurement

Digital vacuum gauge

Others

Supply voltage

AC220V,50Hz

Whole machine power

800W

Sputtering vacuum

20Pa

Whole machine size

Length 360mmWidth 300mmHeight 470mm

Weight of the whole machine

30Kg

Sputter Coater




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