Tel : +86-592-3926659
Email : gilia@inthelaboratory.com
DC Double Target Magnetic Controlled Coater Coating Instrument
Dual-target magnetron sputtering coating meter
The two-target magnetron sputtering coating instrument is developed by a small laboratory with two targets, which can be used in the preparation of single or multi-layer iron film, conductive film, alloy film, semiconductor film, ceramic film, medium film, optical film, etc.The magnetic control sputtering is compared to the normal plasma sputtering has the advantage of high energy speed, high coating speed, low temperature rise, typical high temperature and low temperature sputtering. The magnetic control target is equipped with water-cooled interlayer, the water cooling function is enough to take the heat away, avoid the heat in the target surface, and make the magnetic control coating can work for a long time.Compared with similar equipment, this two-target sputtering film is not only widely used, but also is a good device for preparing films.
Technical parameters:
|
Project |
Detail |
|
|
Supply voltage |
AC220V，50Hz |
|
|
Machine power |
3KW |
|
|
Ultimate vacuum |
10-6torr |
|
|
Loading platform parameters
|
Dimension |
φ140mm |
|
Heating temperature |
Max.500℃ |
|
|
Temperature control accuracy |
±1℃ |
|
|
Speed technical parameters: |
1-20rpm adjustable |
|
|
Magnetron sputtering head parameters
|
Quantity |
2*2" magnetron sputter head |
|
Cooling mode |
Water cooling, required velocity 10l/min |
|
|
Specification of water cooler |
The circulating water cooling machine of 16l/min velocity |
|
|
Vacuum chamber |
Cavity size |
φ300mm X 300mm H |
|
Cavity material |
Stainless steel |
|
|
Viewing window |
φ100mm |
|
|
Opening mode |
Top open, easy to replace target material |
|
|
Gas flow controller |
The four paths are n2, aro2, air; The range is 0-500sccm |
|
|
Vacuum pump |
Equipped with a set of molecular pump system, pumping 600l/s |
|
|
Film thickness meter |
Quartz vibrating film thickness gauge, Resolution 0.10 |
|
|
Sputtering power supply |
Dc power supply, 500W, suitable for preparing metal film One RF power supply, 300W, suitable for non-metal coating |
|
|
Mode of operation |
Panel button operation |
|
|
Overall size |
1400mm X 750mm X 1300mm |
|
|
Machine weight |
300kg |
|
IPv6 network supported 