Vacuum Pump Set

(Oil required) Rotary Vacuum Pump+(Oil free)Turbo Molecular Pump set

Rotary Pumping Speed

50 Hz: 16 m³/h (4.4 L/s)/60Hz: 19.2m³/h (5.2 L/s)

Molecular Pumping Speed

300 L/S

Vacuum Limit

5x10^-5 Pa

Working Pressure

0.5-5 Pa

Vacuuming Time

＞10 Min ( 10^-3 Pa )

Vacuum Measure

Measuring range from atmosphere to 1x10^-6 pa

Gas Control

Gas Flow Controller

Chamber Size

φ260*200mm(height)Metal

Magnetron Target Source

Target sizeφ50*3mm(Cu)/Target source: Weak Magnetic Substance/Materials 

Operation Method

Instruction Manual

Weight / Size

100kg/610mm length x 420mm wide x 490mm high

Power Supply

AC 110V 60Hz or AC 220V 50Hz

Power Consumption

＜3000W

Cooling Consumption

Air Cooling(Pump)+Water Cooling(Sputtering Target)

Warranty

One year limited warranty with lifetime product support