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High Vacuum Stainless Steel Cavity Plasma Sputtering and Evaporation Two-in-one Coater

Contact Person:Gilia Ding


Email: gilia@inthelaboratory.com

Tel:+86 177 5900 4070
Telephone:+86-177-59004070
Whatsapp: +86 177 5900 4070
Wechat:Dingqiuna



  • Item no.:

    LITH-SEC
  • Payment:

    L/C, T/T, Western Union, Credit Cards, Paypal
  • Lead Time:

    7 days
  • Compliance:

    CE Certified
  • Warranty:

    Two years limited standard warranty
  • Product Detail

High Vacuum Stainless Steel Cavity Plasma Sputtering and 


Evaporation Two-in-one Coater

  

 



Introduction

Plasma sputtering and evaporation two-in-one coater is equipped with DC sputtering target and thermal evaporation component, which can be used not only for plasma sputtering of metal films, but also for evaporation of carbon or other metal monomer films. The instrument components are highly integrated to achieve two coating functions in the same chamber; the coating instrument uses 304 stainless steel chamber as the vacuum chamber, and the coating process is fully visible. The instrument is equipped with a bipolar rotary vane vacuum pump, which can quickly reach the vacuum level of 1.0E-3Pa and the ultimate vacuum level of 1.0E-5Pa, which can meet the vacuum environment required for most evaporation coating experiments and dipole sputtering experiments. This instrument is small in size, space-saving, can be placed on the test bench, a multi-purpose machine, outstanding cost performance, very suitable for universities and research institutions to use.

 

Application

Scanning electron microscope sample surface spraying gold, evaporated gold spraying carbon and other operations, as well as the production of non-conductor materials test electrodes, etc.

 

Technical parameters

Supply voltage

AC220V60Hz

Maximum power

1200W

Sample stage

Diameter φ65mm;

Adjustable spacing with evaporation source, adjustment range 60mm-100mm

Vacuum chamber

Material304 Stainless Steel O.Dφ168mm x I.Dφ160mm x 210mm

Max. temperature

1700℃

Thermocouple

Type B Thermocouple

Vacuum Gauge

Electronic vacuum gauge

Vacuum System

Pre-stage pump: Pufa MVP030 oil-free pump pumping speed of 30L/min

Secondary pump: Leybold TURBOVAC 90iX pumping speed 90L/s

Vacuum interface

KF40

Air inlet interface

1/4 Fitting

Whole machine size

500x350x400mm

Sputtering and Evaporation Coater




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