Au/Carbon Magnetron Sputter Depostion Coater Machine PVD System For SEM

Model:  Lith-HZ-JS03- Au/Carbon Coating Magnetron Sputter Coater

Product Overview

The  Lith-HZ-JS03 Dual-Target Magnetron Ion Sputtering Coater, independently developed with cutting-edge technology, sets a new benchmark for sample preparation instruments. It integrates dual-target co-sputtering and multi-layer single-sputtering capabilities, featuring a standard rotating/tilting module for multi-angle, uniform film coverage. This design eliminates charging effects, enhances sample contrast, and delivers high-resolution, true-to-life morphological characterization—ideal for advanced material science and biological research.

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Technical Specifications

Category	Parameter	Specification
Core Parameters	Model	HZ-JS03
	Vacuum Chamber (mm)	160 × 120
	Sputtering Voltage	300–700 V
	Sample Stage (mm)	Adjustable 80–100 diameter
	Sputtering Type	Magnetron
	Working Vacuum	2–10 Pa
System Configuration	Power Supply	100–250 VAC, 50/60 Hz
	Target Size (mm)	φ50 × 0.1
	Control System	5" Touchscreen (ARM)
	Max. Power Consumption	100 W
Process Control	Sputtering Current	10–50 mA (±1 mA)
	Sputtering Time	0–600 s (±1 s)
	Ultimate Vacuum	<1 Pa
Safety & Monitoring	Vacuum Measurement	Digital Pirani Gauge
	Protection	Current/Vacuum interlock

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Instrument Highlights

1. SEM-Optimized Coating Performance

· Dual-target configuration: Enables sequential Au/Pt and Carbon deposition without breaking vacuum

· 2-10Pa working vacuum: Specialized for minimum oxidation during conductive coating

· <5nm particle size: Finer than conventional sputter coaters (typically 10-20nm)

2. Intelligent Process Control

· 300-700V voltage range with 1mA precision – 30% wider than standard systems for optimal film density

· Real-time plasma monitoring prevents arcing on sensitive samples

3. Ergonomic Design

· 160mm large chamber: Accommodates tall SEM stubs (up to 25mm) and irregular specimens

· Tool-free target change

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Target Applications

▸ Life Science: Coating for pollen, plant tissues, and hydrated biological samples
▸ Materials Research: Nanowires, polymer films, and porous materials
▸ Failure Analysis: PCB cross-sections and insulating components

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Operational Advantages

· One-cycle coating: 12 samples/batch (50% more than competitors)

· Zero thermal damage: Magnetron confinement keeps samples <40°C

· Self-diagnostics: Automatic pump protection and target life counter