Vacuum Pump

(Oil required) Rotary Vacuum Pump

Rotary Pumping Speed

50 Hz: 16 m³/h (4.4 L/s) / 60 Hz: 19.2m³/h (5.2 L/s)

Turbo Molecular Pumping Speed

600 L/S

Vacuum Limit

5x10^-4Pa

Max Evaporation Current

100A

Working Pressure

5x10^-3Pa

Vacuuming Time

5 Min ( 2 Pa )

Vacuum Measure

Measuring range from atmosphere to 1x10^-5 pa

Chamber Size

(p250*300mm(height) Scratch Resistant Quartz Glass

Evaporation Target Source

Target material: Carbon Rod ((p5mm) / Target source: Carbon Rod

Operation Method

Instruction Manual