Hybrid PVD CVD Coater for Multi Layer Film Deposition
VTC-16--PW is a compact powder PVD coater, which consists of 2" water cold magnetron sputtering head and vibration stage. The particles will jump on the vibration stage during the coating and form a core-shell structure. The DC magnetron sputter is suitable for coating for metallic materials. RF power source is optional for non-conductive material or carbon. The coater will be useful for preparing special powder for 3D printing and solid-state electrolyte powders.
SPECIFICATIONS
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Power
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208 - 240VAC, 50/60Hz, single phase
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3000 W
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Furnace
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The Whole PCV/CVD system is integrated into the compact 1100°C Single Zone 5" Verticle Tube Furnace (click Pic. left for detail specs)
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Sputtering Head
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Click Picture left for detail specs
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1" flexible magnetron sputtering head with water cooling jacket is included
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The distance between the sputtering head and the sample stage is adjustable from 60 - 100 mm
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One Water Cold Recirculating Water Chiller 16 L/min Flow is included for cooling sputtering head
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Rotary Sample Stage
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One 3" Dia. the rotary sample holder is in installed on the bottom flange of the vertical tube furnace
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Rotation speed is adjustable: 1 - 10 rpm for uniform coating
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Control Panel
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6" color touch-screen control panel with PLC integration for easy operation
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One panel for all parameters monitor and control: vacuum, current
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Ultimate Vacuum Pressure
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Built-in KF25 vacuum port
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The system requires an Ar gas tank with a pressure regulator (not included)
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< 1.0E-2 Torr by Vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets (not sensitive to air)
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< 1.0E-5 Torr by Turbomolecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air)
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The lowest vacuum may reach < 4.0E-6 Torr by pumping overnight and baking
  
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Gas Atmosphere
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One needle valve installed to allow Ar gas inlet to achieve better plasma coating
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The system requires an Ar gas tank with the pressure regulator (not included)
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Target
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One 1" Copper target is included for testing, target size: 1" Dia. x 2.5mm
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It also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Li, Mg, etc. almost every kind of metallic material
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Warning: Aluminum, Chromium or Nickel can be coated by this machine, but please view the Recommend Coating Method in the below target link
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Please using RF Plasma Magnetron Sputtering coater for coating non-conductive materials and carbon
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Net Weight
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Compliance
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CE approval
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NRTL (UL 6100) certification is available upon request at an extra cost, please contact our sales representative for a quote
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Tel : +86-592-3926659
Email : gilia@inthelaboratory.com
IPv6 network supported 