Ultrasonic Spray Coater Equipment For Thin Film Deposition

Specifications:

· Overall Dimensions:
Main unit: 800×500×690mm
With injection pump: 1080×500×690mm

· Maximum Coating Area: 200×200mm

· Motion System: 3-axis automation with programmable motion trajectories

· Control Method: High-precision motion card/physical buttons

· Ultrasonic Spray Head:
Standard: 1 set of any TMAX ultrasonic spray head (customizable for multiple sets)

· Applications:
Qualitative experiments in scientific research laboratories, small-batch production, and thin-film fabrication

Overview:
The basic ultrasonic precision spray coater is designed for enterprises, universities, and research institutes new to ultrasonic spray technology. The equipment features a simple yet elegant structure with comprehensive functionality, including:

· XYZ 3-axis precision motion modules

· A versatile trajectory editing system capable of 2D planar patterns (rectangles, circles, triangles, or curves)

· Compatibility with all ultrasonic spray heads

· Precision constant-flow injection pump

· Digital display carrier gas system

· Optional ultrasonic dispersion liquid supply system and vacuum adsorption heating substrate

· Suitable for use in fume hoods

Advantages:

1. 4× Efficiency:
Ultrasonic atomization spray achieves up to 4× higher material utilization than conventional methods, significantly reducing material costs.

2. Nanoscale Film Thickness:
Capable of producing ultra-thin films as thin as tens of nanometers with exceptional uniformity.

3. Pressure-Free Atomization:
Utilizes high-frequency ultrasonic vibration for atomization without compressed air, eliminating substrate impact from high-pressure gas.

Precision Motion Module:

· XYZ axes equipped with stepper motors

· Fully enclosed linear screw modules for extended lifespan

· Repeat positioning accuracy: 0.01mm

Ultrasonic Spray Head System:
TMAX offers dozens of ultrasonic spray head models to meet various working conditions and film thickness requirements.

Operating System:

· TMAX's dedicated control system for ultrasonic spraying

· User-friendly interface with integrated control for:

o Ultrasonic atomization/dispersion

o Injection pump

o Carrier gas

o Heating stage

o Vacuum adsorption plate

· Features:

o One-click template trajectory generation

o G-code complex trajectory editing

Standard Configuration:

Optional Configurations: