Parameter

Specification

Rotary Pumping Speed

50 Hz: 8 m³/h (2.2 L/s) / 60 Hz: 9.6 m³/h (2.6 L/s)

Vacuum Limit

2 Pa

Max Sputtering Current

100 mA

Max Evaporation Current

100 A

Sputtering Working Pressure

20 Pa – 8 Pa

Evaporation Working Pressure

6 Pa – 4 Pa

Working Vacuuming Time

< 5 min (to 2 Pa)

Vacuum Measurement

Atmosphere to 2×10 mbar

Gas Control

Gas Flow Controller

Chamber Size

Ø150 × 120 mm (height), scratch-resistant quartz glass

Magnetron Target Source

Ø50 × 0.1 mm (Au) / Optional: Au, Ag, Pt

Evaporation Target Source

Carbon Rope

Operation Method

Manual (instruction manual included)

Dimensions (Main Unit)

360 mm (L) × 300 mm (W) × 380 mm (H)

Dimensions (Evaporation Unit)

360 mm (L) × 300 mm (W) × 160 mm (H)

Weight

55 kg

Power Supply

AC 110V 60Hz or AC 220V 50Hz

Power Consumption

< 2000 W

Cooling Method

Air Cooling (Evaporation) + Water Cooling (Sputtering)

Warranty

1-year limited warranty with lifetime product support