Manual & Auto Lab Sputter Coater for Low Temperature SEM Carbon Preparation
Model: Lith-BY-JS01 DC Ion Sputtering Coater
Introduction
The Lith-BY-JS01 Ion Sputtering Coater is designed for high-quality SEM sample preparation. Compared to conventional sputtering systems, it features magnetron sputtering technology, making it suitable for temperature-sensitive samples (e.g., thin films, rubber). The system offers automatic/manual operation modes, adjustable vacuum control, and auto-venting functionality, with optional rotary sample stage compatibility. Its user-friendly interface and stable performance make it ideal for universities and research institutes.
Key Specifications
|
Parameter |
Value |
|
Dimensions (Main Unit) |
510mm (L) × 310mm (W) × 290mm (H) |
|
Target Material |
Au, 50mm (D) × 0.1mm (H) |
|
Sample Chamber |
Glass chamber, Ø180mm × 120mm (H) |
|
Sample Stage Diameter |
Ø70mm (rotary stage optional) |
|
Target Size |
Ø50mm |
|
Ultimate Vacuum |
1 Pa |
|
Operating Vacuum |
2–15 Pa |
|
Sputtering Current |
0–50 mA (adjustable) |
|
Timer |
Digital, 0–600 sec |
|
Coating Area |
50mm diameter |
|
Deposition Rate |
0–60 nm/min |
|
Vacuum Measurement |
Pirani gauge |
|
Touchscreen |
4-inch HMI interface |
|
Gas Compatibility |
Supports multiple gases |
|
Mechanical Pump |
VRD-8 |
|
Power Consumption |
100 W |
Features & Applications
1. Magnetron Sputtering Technology
· Enables low-temperature coating for delicate samples (e.g., polymers, biological specimens).
· Stable target design ensures uniform film deposition.
2. Dual Operation Modes
· Automatic mode: Streamlines repetitive tasks.
· Manual mode: Offers flexibility for customized protocols.
3. Adjustable Sputtering Modes
· Standard/gentle startup accommodates sensitive materials.
4. Intelligent Vacuum Control
· Auto-pressure stabilization eliminates manual adjustments and reduces coarse grain formation.
5. User-Friendly Interface
· Simplified/advanced UI options cater to users of all experience levels.
6. Optional Rotary Stage
· Enhances coating uniformity for complex geometries.
Typical Applications
· SEM sample preparation (metals, ceramics, polymers).
· Thin-film deposition for research in materials science, life sciences, and nanotechnology.








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