High Speed Spin Coater with PTFE Heating Cover and Ultrasonic Spray

  LithC-VTC100PA-PTFEUS is a tabletop spin coater up to 5" diameter at Max. 10000 rpm equipped with a heatable PTFE cover. Two ultrasonic spray nozzles and a heatable glass syringe are included as multiple functions to make liquid atomized or provide a heated solution. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has a user-friendly keyboard and LCD display for programming various parameters up to 12 programs, and 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion-protected to make it cleanroom compatible.

This spin coaster can be used inside the glovebox with Ar gas (Vacuum pump must be placed outside the glovebox).

SPECIFICATIONS:

Features		500 ~ 10000 RPM spinning speed programmable PTFE chamber is capable of drying temperatures up to 200°C. Accept substrate from 5 mm to 5" Ultrasonic spray nozzles are included to make liquid-atomized via gravity and low-pressure compressed air. The heatable glass syringe is used to provide a heated solution for spin coating. One gas inlet port on top of the cover for gas filling during the coating. The safety interlock is integrated into the lid.
Liquid Injection		Three liquid injection methods are designed: The ultrasonic spray nozzles are made of Titanium alloy with a power controller for DIY spray pyrolysis. (Pic.1&2) One cylindrical nozzle - provides a narrower spray pattern with ~2 cm diameter. One cone nozzle - provides a wider spray pattern with ~ 4 cm diameter. The heatable glass syringe with a digital single-point PID temperature controller up to 120°C (<10 minutes) (Pic.3) A 20ml plastic syringe is included. (Pic.4)        Pic.1            Pic.2                    Pic.3             Pic.4
Coating Chamber		PTFE chamber for anti-corrosive operation Chamber size: 150 mm diameter Max. Temperature: up to 200°C (<10mins) A set of PTFE vacuum chucks (Ø 40mm and Ø 10mm) are included to hold substrates from 1-inch to 4-inch wafers. About "How to use a vacuum chuck to hold a 10mm square sample", please click the video on the right below.
Vacuum Pump		One 120L/min Oilless Vacuum Pump and Ø 8mm plastic vacuum tube are included.
Programmable Control		The digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click the picture left to see typical program settings). Speed: 500 rpm - 10000 rpm programmable Duration up to 60 seconds for each segment Acceleration: 100 - 2000 rpm/sec adjustable Accuracy: < 5%
Input Power		AC 220V (Please email us for AC 110V Version) 1000 W total for the oilless pump and spin coater 24VDC high-speed motor
Gas Inlet		A 6mm diameter gas inlet port on top of the cover allows customers to fill desired gas into the chamber, which can make coating under a variable gas flow environment.
Optional		PE heating cover with a digital single-point PID temperature controller up to 120°C(<10 minutes) is available upon request. The drying process solidifies the as-coated film in less than a few minutes. (Pic.1) UV LED lights and controller with 365 nm wavelength for curing and polymerization are available upon request. (Pic.2)     Pic.1                             Pic.2
Application Notes		To use inside the Ar glovebox, feedthroughs are required to connect the spin coater, the vacuum pump, and the controller, which is optional upon request.  To achieve optimal coating quality, please consider cleaning substrates with a plasma cleaner before coating (Pic.2) to significantly reduce the surface tension on the substrates. The OFDP-2 is a tiny silent powerful diaphragm pump, which is made in Germany and provides excellent vacuum performance.               Pic.1                       Pic.2
Compliance		CE Certified NRTL or CSA certification is available at an extra cost.
Warnings		Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues in the bow/base. Please turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. For more details about the cleaning procedure, please review the "Cleaning Instructions for the Spin Coaters".

 

PACKAGE:

  1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

  2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

  3 Responsible for the damage during the shipping process, will change the damaged part for you for free.

DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to 

production season and order quantity.