DC Magnetron Sputtering Coater for Noble Metals

Contact Person：Gilia Ding

Email: gilia@inthelaboratory.com

Tel：+86 177 5900 4070
Telephone:+86-177-59004070
Whatsapp: +86 177 5900 4070
Wechat：Dingqiuna

Brand:
LITH
Item no.:
LITH-VTC-16-D
Payment:
L/C, T/T, Western Union, Credit Cards, Paypal
Lead Time:
7 days
Compliance:
CE Certified
Warranty:
Two years limited standard warranty

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Product Detail

DC Magnetron Sputtering Coater for Noble Metals

VTC-16-D is a Desktop Magnetron Sputtering Coater with a 2" head and height adjustable sample holder. It is designed for thin-film coating for noble metals (Au, Ag, Pt), especially for coating conductive gold film on SEM samples.One 2" gold (4N) target is included. To sputter active metals, such as Al, Mg, Zn, or Carbon target, please consider the High Power magnetron sputtering coater or thermal evaporation coater

SPECIFICATIONS

Feature	Compact magnetron sputtering coater, for coating conductive noble metal film on SEM samples (Au, Ag, Pt) One 2" gold (4N) target is included
Power	220 VAC 50/60Hz, 200W 110VAC power is available by using a 1000 W transformer (15 A fuse). The transformer is sold separately
Sputtering Head	2" diameter 500 VDC 0 - 50 mA (max.) adjustable sputtering current Over-current protection Manual shutter for pre-sputtering cleaning.
Sputtering time	1 -120 seconds adjustable
Vacuum Chamber	Quartz glass tube, 165 mm OD. x 150 mm ID x 150 mm Height Please click here to order the spare quartz chamber. KF25 port for vacuum pump. Ultimate pressure is about 1 Pa via a mechanical pump. (vacuum pump is optional)
Pirani Vacuum Gauge	Range: 1e-4 - 1000mbar (1e-4 - 750 torr) Accuracy: 1000 - 20mbar, 3% of reading 20 - 0.002mbar, 2% of reading Repeatability: 2% of reading
Sample Stage	2" diameter height adjustable, 25 - 70 mm from the sample to the target
Vacuum pump (optional)	The double stage rotary vane pump EQ-FYP is recommended. A turbopump is also available to achieve 1.0E-5 Torr
Gas Inlet	One 1/4" compression tube fitting as the gas inlet. One leak valve to adjust the leak rate of Ar gas.
Target	4N purity gold target is included and preinstalled. (50mm Dia. x 0.12mm
Compliance	CE Certified NRTL certification is NOT available temporarily.
Application Notes	To use the sputtering coater inside the glove box, the controller and coater base will be separated. (Pic.1) For active metals, such as Al, Mg, Zn, or Carbon target, please consider our High Power magnetron sputtering coater (Pic. 2) or thermal evaporation coater. (Pic. 3) Pic. 1 Pic. 2 Pic. 3