3000rpm Fume Hood Automated12inch Wafer Ultrasonic Spin-Spray Coater with Heater
Ultrasonic Spin-Spray Coater VTC-300BUSS is an all-in-one film preparation equipment that combined ultrasonic atomization, spin coating, and drying functions, on a substrate up to 12" (300mm). The liquid is driven by a precision syringe pump with an optional heating function. The ultrasonic atomizer is able to swing over the substrate, thus ensuring the coating uniformity (up to 4 ultrasonic heads). After coating, the film can be heated and quickly dried. The equipment adopts a touch screen control panel, and it can accurately control the parameters such as the ultrasonic power, spray rate, spinning speed, and heating temperature.
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Applications include thin-film preparation for perovskite solar cells, composites, and flexible films.
SPECIFICATIONS:
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Power
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Power: 208 - 240 VAC, 50/60 Hz, single-phase, 1800 W in total
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Spin Coater
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One vacuum chuck for holding substrate up to 12" diameter or 8" square
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One oil-less pump for the vacuum chuck is included and controlled by the spin coater
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Spin speed: 300 - 3000 rpm programmable
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Ultrasonic Spray Nozzle
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One ultrasonic generator (up to 50KHz, 100W) with two ultrasonic sprays nozzles
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Two spray nozzles with KF-25 adapters
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One cylindrical type -- narrower spray ~20 mm diameter
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One cone type -- wider spray ~40 mm diameter
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Recommended compressed inert gas or air for the aqueous solution: ~2 psi ( not included)
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Fluid viscosity range: 1 - 50 mPa·s (cP)
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Particle size: 10-20 microns (suspension liquid), ≤10% solid
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Flow rate: 0.6 pL-4 ml/min
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One swing arm for mounting ultrasonic spray head.
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Optional: 2- 4 ultrasonic swing spray heads can be added for layer by layer coating at the extra cost
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Syringe Pump
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One syringe pump with LCD touch screen control is included for liquid delivery.
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One 50 mL syringe is included. The unit can accommodate a syringe with 0.4-30 mm diameter
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Pumping rate: 0.01-0.99mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)
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Options: heatable and multi-channel syringe pump is available upon request at the extra cost
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Control Panel
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Touch screen panel controls most of the parameters, includes
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Spin speed: 300 - 3000 RPM
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Nozzle swing speed: 1-20°/s
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Temperature: RT-50°C
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Spraying time: 1- 999 seconds
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Syringe pump speed> 0.6 pL-4 ml/min
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Fume Hood & Heating
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The machine is built-in with a fume hood with a 4" venting port
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IR heater is a built-inside hood with temperature control up to 80ºC for drying film after coating
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LED light is inside the hood
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Utility Requirement
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Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MTI
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Attention: If a gas cylinder is used instead of an air compressor(pic2), a two-stage pressure regulator(pic1) must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. Click here to learn the installation of a gas regulator.
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Dimension and Net Weight
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Compliance
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CE Certified
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NRTL certification is only available with compressive gas atomizing spray nozzle
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Warranty
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One year limited with lifetime support
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Rusting and damage due to improper storage condition or maintenance are not covered by warranty
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Operation Manual & Video
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Please stay tuned.
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Application Notes
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Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the liquid residues in the bow/base.
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In order to achieve optimal coating quality, please consider cleaning the substrate with a plasma or UV-Ozone cleaner (Click the pictures below for more details) prior to coating. It will significantly reduce the surface tension on the substrates
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